Process window widening using coated parts in plasma etch processes

ABSTRACT

Embodiments of the present technology may include a method of etching. The method may include mixing plasma effluents with a gas in a first section of a chamber to form a first mixture. The method may also include flowing the first mixture to a substrate in a second section of the chamber. The first section and the second section may include nickel plated material. The method may further include reacting the first mixture with the substrate to etch a first layer selectively over a second layer. In addition, the method may include forming a second mixture including products from reacting the first mixture with the substrate.

TECHNICAL FIELD

The present technology relates to semiconductor processes and equipment. More specifically, the present technology relates to improving process selectivity during low pressure etching operations.

BACKGROUND

Integrated circuits are made possible by processes which produce intricately patterned material layers on substrate surfaces. Producing patterned material on a substrate requires controlled methods for removal of exposed material. Chemical etching is used for a variety of purposes including transferring a pattern in photoresist into underlying layers, thinning layers, or thinning lateral dimensions of features already present on the surface. Often it is desirable to have an etch process that etches one material faster than another facilitating, for example, a pattern transfer process. Such an etch process is said to be selective to the first material. As a result of the diversity of materials, circuits, and processes, etch processes have been developed with a selectivity towards a variety of materials.

Dry etches produced in local plasmas formed within the substrate processing region can penetrate more constrained trenches and exhibit less deformation of delicate remaining structures than wet etches. However, even though an etch process may be selective to a first material over a second material, some undesired etching of the second material may still occur.

Thus, there is a need for improved systems and methods that can be used to produce high quality devices and structures. These and other needs are addressed by the present technology.

BRIEF SUMMARY

As semiconductor devices become smaller, patterning these devices may become more challenging. Smaller features may be harder to define. This may be a result of the decreased size or of more stringent tolerances needed for performance, reliability, and manufacturing throughput. The methods described below may provide an improved patterning process.

Flowing a mixture of plasma effluents and a gas by nickel plated materials may allow for etching at lower pressures. Lower pressure processing may be advantageous for smaller and deeper semiconductor features by facilitating etchants to travel to the bottom of a narrow and deep feature without contacting and etching a sidewall. Nickel plating may increase selectivity by maintaining a low etch amount of silicon at lower pressures. Without intending to be bound by theory, it is believed that nickel may scavenge fluorine radicals or hydrogen radicals, which may be responsible for undesired etching of silicon. Nickel may coat parts of the chamber that are downstream of significant mixing of gases and plasma etchants. Nickel and may coat all parts along the flow path of plasma effluents in the chamber downstream of mixing.

Embodiments of the present technology may include a semiconductor processing system. The system may include a remote plasma region. The system may also include a processing region fluidly coupled with the remote plasma region by a channel. The system may further include a gas inlet fluidly coupled to the channel. The gas inlet may define a flow path for a gas that does not pass through the remote plasma region before entering the processing region. The processing region may include a pedestal configured to support a substrate. The processing region may be at least partially defined by a sidewall and a showerhead. The sidewall and showerhead may be plated with nickel.

Embodiments of the present technology may include a method of etching. The method may include mixing plasma effluents with a gas in a first section of a chamber to form a first mixture. The method may also include flowing the first mixture to a substrate in a second section of the chamber. The first section and the second section may include nickel plated material. The method may further include reacting the first mixture with the substrate to etch a first layer selectively over a second layer. In addition, the method may include forming a second mixture including products from reacting the first mixture with the substrate.

Embodiments of the present technology may include a method of etching. The method may include flowing a first gas including ammonia and a fluorine-containing gas through a plasma to form plasma effluents. The method may also include flowing the plasma effluents through a first section of a chamber. The first section may not include nickel plated material. The method may further include mixing a second gas including ammonia with the plasma effluents in a second section of a chamber to form a first mixture. In addition, the method may include flowing the first mixture to a substrate in a third section of the chamber. The method may also include reacting the first mixture with the substrate to etch a silicon oxide layer selectively over a silicon layer. Then, the method may include forming a second mixture comprising products from reacting the first mixture with the substrate. The second mixture may be flowed through a fourth section of the chamber to exit the chamber. The second section, third section, and fourth section may include nickel plated material.

BRIEF DESCRIPTION OF THE DRAWINGS

A further understanding of the nature and advantages of the disclosed technology may be realized by reference to the remaining portions of the specification and the drawings.

FIG. 1 shows a semiconductor processing system according to embodiments of the present technology.

FIG. 2 shows a method of etching according to embodiments of the present technology.

FIG. 3 shows a method of etching according to embodiments of the present technology.

FIGS. 4A, 4B, and 4C show etch amounts using a nickel coated chamber and an anodized aluminum chamber according to embodiments of the present technology.

FIG. 5 shows a top plan view of one embodiment of an exemplary processing tool according to embodiments of the present invention.

FIGS. 6A and 6B show cross-sectional views of an exemplary processing chamber according to embodiments of the present invention.

FIG. 7 shows a schematic view of an exemplary showerhead configuration according to embodiments of the present invention.

FIG. 8 shows a schematic cross-sectional view of an exemplary processing system according to embodiments of the present technology.

FIG. 9 illustrates a schematic bottom partial plan view of an inlet adapter according to embodiments of the present technology.

DETAILED DESCRIPTION

Conventional systems and methods for etching silicon oxide may not be suited for low pressures. Low pressures may be preferable for smaller and deeper semiconductor features. However, at lower pressures, etch selectivity may decrease. For example, during the etch of thermal oxide at lower pressures, the etch amount of thermal oxide may decrease, while the etch amount of silicon may increase. At low pressures, the density of reactive components, such as radicals, decreases. As a result, the etch rate of thermal oxide may decrease. Unreacted or incompletely reacted species may also be present in the chamber. At lower pressures, these unreacted species (e.g., fluorine radicals or hydrogen radicals) may react with silicon in the substrate, increasing the etch rate of silicon. Conventional methods etching at increased chamber pressure in order to react the radicals with the substrate or other gaseous species.

Embodiments of the present technology may allow for low pressure etching of thermal oxide without substantially decreasing selectivity over etching of silicon. Chamber parts plated in nickel may reduce the amount of unreacted radicals. With fewer unreacted radicals, the radicals are more likely to etch thermal oxide and not be present to etch silicon.

I. SYSTEM OVERVIEW

As shown in FIG. 1, embodiments of the present technology may include a semiconductor processing system 100. System 100 may include a remote plasma region. The remote plasma region may include remote plasma source 102.

System 100 may also include a processing region fluidly coupled with the remote plasma region by a channel defined by isolator 104. Isolator 104 may be a ceramic material, such as alumina. Isolator 104 may not be plated with nickel. The processing region may include areas of the chamber from where the gases and plasma effluents mix to where the plasma effluents react with a substrate to the exit from the chamber. The processing region may include a region from, but not including isolator 104, to a port from the chamber to a pump.

System 100 may further include a gas inlet 106 fluidly coupled to isolator 104. The gas inlet may define a flow path for a gas that does not pass through the remote plasma region before entering the processing region. Plasma effluents from plasma source 102 may enter isolator 104 through inputs 108. Gas inlet 106 and inputs 108 may be disposed in a remote plasma source (RPS) adapter 110. RPS adapter 110 allows a remote plasma source to connect to the chamber. RPS adapter 110, gas inlet 106, and inputs 108 may not be plated with nickel.

Downstream of isolator 104 is a mixing manifold 112. Mixing manifold 112 may define a flow path that is not substantially straight. For example, mixing manifold may include a reduction (e.g., a taper) and/or expansion in the flow path size in order to mix the gas and the plasma effluents. Mixing manifold 112 may lead to gasbox 114. Gasbox heater 116 may be disposed on gasbox 114.

After gasbox 114, system 100 may be configured so that the plasma effluents and other gases pass through uniform blocker 118, uniform faceplate 120, and uniform selective modular device (SMD) 122. System 100 may include a reaction region, at least partially defined by uniform SMD 122 and spacer 124. The reaction region may be a portion of the processing region.

The processing region may include a pedestal 126 configured to support a substrate. The pedestal may be plated with nickel, but a nickel plated pedestal may not affect the selectivity of the etch as the substrate may cover the pedestal. The substrate may be a semiconductor wafer, including a silicon wafer. System 100 may include an annulus (i.e., edge ring 128) disposed on the circumference of pedestal 126. The annulus may be plated with nickel.

System 100 may include a pumping liner/channel 130. Pumping liner/channel 130 may include an outlet from the chamber to a pump. System 100 may also include lid plate insert 132.

The processing region may include regions defined from mixing manifold 112 to pumping liner/channel 130. The processing region may be at least partially defined by a sidewall (e.g., spacer 124 or any part that forms the chamber wall), and a showerhead (e.g., uniform SMD 122). The sidewall and showerhead may be plated with nickel. Some or all surfaces from the mixing of the gases in mixing manifold 112 to pumping liner/channel 130 may have surfaces plated with nickel, including for example, electroless nickel plating or nickel electroplating. Electroless nickel may include nickel with boron or nickel with phosphorous. Parts downstream of isolator 104 may have surfaces plated with nickel. In other words, mixing manifold 112, gasbox 114, uniform blocker 118, uniform faceplate 120, uniform SMD 122, spacer 124, edge ring 128, and pumping liner/channel 130 may be plated with nickel or another metal that scavenges excess radicals. A pressure plate, an inlet adapter, and a diffuser (not shown in FIG. 1, but shown in FIG. 8) may be between isolator 104 and mixing manifold 112 and may each be plated with nickel or another metal that scavenges excess radicals. Other metals may include platinum or palladium, but both may be too expensive. The parts plated with nickel may include a metal other than nickel before plating. For example, the parts may include stainless steel or aluminum.

FIG. 1 is a simplified diagram of a system. FIG. 8 shows a similar diagram of a system and is described below. One of skill would understand that any of the parts (e.g., metal parts) in FIG. 8 from the mixing of plasma effluents and gases downstream of isolator 104 (e.g., from pressure plate 4025) to exiting the chamber may be plated with nickel.

II. METHODS

Embodiments include methods of etching, which may use the system of etching described herein.

A. Example Method

As shown in FIG. 2, embodiments of the present technology may include a method 200 of etching. In block 202, method 200 may include mixing plasma effluents with a gas in a first section of a chamber to form a first mixture. The plasma effluents may include effluents from flowing ammonia and a fluorine-containing gas through a plasma. The fluorine-containing gas may include NF₃ and/or HF. In some embodiments, the plasma effluents may include effluents from flowing ammonia, NF3, argon, H₂, helium, and HF through a plasma. The first section may include nickel plated material, including electroless nickel plated material. The first section may include a mixing manifold, similar to mixing manifold 112 in FIG. 1. In embodiments, the first section may include a tapered path (e.g., central aperture 4023 in FIG. 8). The tapered path may mix the gases more than a non-tapered path, which may allow for nickel-plated parts to scavenge radicals. The gas may include ammonia or hydrogen.

Before mixing the plasma effluents, the plasma effluents may be flowed through a section of the chamber that does not include nickel plated material. Parts of the chamber before the gas is introduced may not be plated with nickel. For example, in FIG. 1, RPS adapter 110 may not be plated with nickel. Plating the RPS adapter with nickel may decrease the amount of silicon oxide etched but increase the amount of polysilicon etched, contrary to the desired outcome. Parts of the chamber that are not metal (e.g., ceramic) or do not allow for sufficient mixing of plasma effluents and gas may also not be plated with nickel. For example, in FIG. 1, isolator 104 is ceramic and cannot be easily plated with nickel. In addition, isolator 104 does not provide the geometry for significant mixing or the plasma effluents and the gas.

In block 204, method 200 may also include flowing the first mixture to a substrate in a second section of the chamber. The second section of the chamber may be at a pressure of 10 Torr or lower, which may include 8 to 10 Torr, 6 to 8 Torr, 4 to 6 Torr, 2 to 4 Torr, 1 to 2 Torr, or lower than 1 Torr. The second section of the chamber may include the pedestal, where the substrate may be located during processing. The second section may include nickel plated material, including any nickel plated material described herein. The first mixture may flow in a path in the chamber from the first section to the second section. The path may be defined by nickel plated parts of the chamber. The path from significant mixing of the plasma effluent and the gas to the exit of the chamber may be defined by surfaces plated with nickel, uninterrupted by surfaces not plated with nickel.

In block 206, method 200 may further include reacting the first mixture with the substrate to etch a first layer selectively over a second layer. The first layer may be a thermal silicon oxide layer. The second layer may be a silicon layer, including a polysilicon layer. The second layer may be any layer that may be etched by fluorine radicals or hydrogen radicals. Reacting the first mixture with the substrate may include etching less than 1 Angstrom of the first layer and greater than 50 Angstroms of the second layer. In embodiments, the second layer may have an etch amount of greater than 50 Angstroms, greater than 100 Angstroms, 200 Angstroms, or 300 Angstroms, while the first layer has an etch amount of less than 1 Angstrom, including less than 0.5 Angstrom or about 0 Angstroms. The selectivity of etching oxide over silicon may be greater than 100, 200, 300, 400, 500, 600, 700, 800, 900, or 1000.

In block 208, method 200 may include forming a second mixture including products from reacting the first mixture with the substrate. Method 200 may also include flowing the second mixture through a section of the chamber to exit the chamber, where the surface of the chamber leading to exit the chamber include nickel plated material. For example, in FIG. 1, pumping liner/channel 130 may be nickel plated.

Method 200 may include adsorbing fluorine atoms or hydrogen atoms onto the nickel plated material. Removing the fluorine atoms or hydrogen atoms from reacting with the substrate may help maintain negligible etching of silicon while etching thermal oxide.

Method 200 may further include removing the substrate from the chamber and performing additional patterning operations on the substrate.

B. Example Method

As shown in FIG. 3, embodiments of the present technology may include a method 300 of etching. In block 302, method 300 may include flowing a first gas including ammonia and a fluorine-containing gas through a plasma to form plasma effluents. The first gas may be any gas described herein.

In block 304, method 300 may also include flowing the plasma effluents through a first section of a chamber. The first section may not include nickel plated material. The first section may include parts of the chamber that are not metal or do not have sufficient mixing of plasma effluents and gas. The first section may be any section of the chamber not plated with nickel as described herein.

In block 306, method 300 may further include mixing a second gas including ammonia with the plasma effluents in a second section of a chamber to form a first mixture. The second gas may not pass through a plasma before mixing with the plasma effluents. The second section of the chamber may be where the gases undergo sufficient mixing. For example, in FIG. 1, the second section of the chamber may include mixing manifold 112. The second section of the chamber may include a tapered aperture and may include pressure plate 4025, inlet adapter 4030, diffuser 4035, and mixing manifold 4040 in FIG. 8.

In block 308, method 300 may include flowing the first mixture to a substrate in a third section of the chamber. The third section of the chamber may include the portion of the chamber where the substrate is etched. In FIG. 1, the third section of the chamber may be at least partially defined by uniform SMD 122 and spacer and may include pedestal 126.

In block 310, method 300 may also include reacting the first mixture with the substrate to etch a silicon oxide layer selectively over a silicon layer. The silicon oxide layer and silicon layer may be any such layer described herein and may be etched as selectively as described herein.

In block 312, method 300 may include forming a second mixture comprising products from reacting the first mixture with the substrate. The products may include etch byproducts from etching silicon oxide.

In block 314, the second mixture may be flowed through a fourth section of the chamber to exit the chamber. The fourth section of the chamber may be at least partially defined by a pump port, or for example, pumping liner/channel 130 in FIG. 1. Exiting the chamber may include entering a section of the system at a significantly different pressure than a section of the system configured to receive a substrate.

The second section, third section, and fourth section may include nickel plated material. The first mixture may flow in a path in the chamber from the second section to the fourth section. The path may be continuous and may be defined by nickel plated parts of the chamber. Any surface from the second section to the fourth section may be plated with nickel and may not include surfaces that are absent nickel plating. As described with FIG. 1, any and all parts from and including mixing manifold 112 to pumping liner/channel 130, with the optional exception of pedestal 126, may be plated with nickel. With FIG. 8, any and all parts from and including pressure plate 4025 to exiting the chamber may be plated with nickel.

III. EXAMPLES

Etch amounts were measured for a system without any nickel plated parts and a system with nickel plated parts. The system with nickel plated parts was a system similar to FIG. 1, with parts downstream of isolator 104 plated with nickel (including mixing manifold 112, gasbox 114, uniform blocker 118, uniform faceplate 120, uniform SMD 122, spacer 124, edge ring 128, and pumping liner/channel 130, as well as a pressure plate, an inlet adapter, and a diffuser not shown in FIG. 1). RPS adapter 110 and isolator 104 were not plated with nickel. The system without nickel plated parts had instead anodized aluminum coatings instead. A gas mixture of NH₃, NF₃, argon, H₂, helium, and HF was flowed through a remote plasma source. The plasma effluents were then mixed with ammonia and flowed to etch a substrate. Etch amounts of thermal oxide and polysilicon were measured.

FIG. 4A, FIG. 4B, and FIG. 4C show the results of etching with a nickel coated chamber and an anodized aluminum chamber. In FIG. 4A, the x-axis is the chamber pressure. The y-axis on the left shows the thermal oxide etch amount in angstroms. A higher thermal oxide etch amount is desired for this process. The diamonds show the thermal oxide etch amounts for nickel coatings, and the triangles show the thermal oxide etch amounts for anodized aluminum coatings. For pressures from 7 Torr to 10 Torr, both systems show similar thermal oxide etch amounts.

The y-axis on the right shows the silicon etch amount in angstroms. The squares show the silicon etch amounts for nickel coatings, and the x's show the silicon etch amount for anodized aluminum coatings. At 10 Torr, both the nickel coating system and the anodized aluminum coating system show close to zero amount of silicon etched. However, as pressure decreases, the silicon etch amount for the anodized aluminum coating system increases. At 6 Torr, the anodized aluminum coating results in about 10 Angstroms of silicon etched. By contrast, even at the lowest tested pressure of 4 Torr, the nickel coated system shows close to no amount of silicon etched.

FIG. 4B shows the results from FIG. 4A but only for the nickel coated system. The graph shows thermal oxide etch amount on the left-hand y-axis, silicon etch amount on the right-hand y-axis, and chamber pressure on the x-axis. The thermal oxide etch amounts are plotted, and the thermal oxide etch amount decreases as pressure decreases. No etch amount of silicon was measured for any chamber pressure. As a result, the nickel coated system showed infinite selectivity for etching thermal oxide over silicon in this example.

FIG. 4C shows the results from FIG. 4A but only for the anodized aluminum system. The graph shows the thermal oxide etch amount on the left-hand y-axis, silicon etch amount on the right-hand y-axis, and chamber pressure on the x-axis. The thermal oxide etch amounts are plotted, and the thermal oxide etch amount decreases as pressure decreases. The etch amount of silicon increases as pressure decreases. At a pressure of 7 Torr, the silicon etch amount was about 10 Angstroms, while the thermal oxide etch amount was about 250 Angstroms. The selectivity at 7 Torr was slightly greater than 25. The results indicate that the silicon etch amount would continue to increase and the thermal oxide etch amount would continue to decrease as chamber pressure decreases. As a result, at pressures lower than 7 Torr, one would expect selectivities lower than 25.

IV. EXEMPLARY PROCESSING SYSTEM

Processing chambers that may implement embodiments of the present invention may be included within processing platforms such as the Producer® Selectra™ etch system, available from Applied Materials, Inc. of Santa Clara, Calif.

FIG. 5 shows a top plan view of one embodiment of a processing tool 1000 of deposition, etching, baking, and curing chambers according to disclosed embodiments. In the figure, a pair of front opening unified pods (FOUPs) 1002 supply substrates of a variety of sizes that are received by robotic arms 1004 and placed into a low pressure holding area 1006 before being placed into one of the substrate processing chambers 1008 a-f, positioned in tandem sections 1009 a-c. A second robotic arm 1010 may be used to transport the substrate wafers from the holding area 1006 to the substrate processing chambers 1008 a-f and back. Each substrate processing chamber 1008 a-f, can be outfitted to perform a number of substrate processing operations including the dry etch processes described herein in addition to cyclical layer deposition (CLD), atomic layer deposition (ALD), chemical vapor deposition (CVD), physical vapor deposition (PVD), etch, pre-clean, degas, orientation, and other substrate processes.

The substrate processing chambers 1008 a-f may include one or more system components for depositing, annealing, curing and/or etching a film on the substrate wafer. In one configuration, two pairs of the processing chamber, e.g., 1008 c-d and 1008 e-f, may be used to deposit material on the substrate, and the third pair of processing chambers, e.g., 1008 a-b, may be used to etch the deposited film. In another configuration, all three pairs of chambers, e.g., 1008 a-f, may be configured to etch a film on the substrate. Any one or more of the processes described may be carried out in chamber(s) separated from the fabrication system shown in different embodiments. Films may be dielectric, protective, or other material. It will be appreciated that additional configurations of deposition, etching, annealing, and curing chambers for films are contemplated by processing tool 1000.

FIG. 6A shows a cross-sectional view of an exemplary process chamber section 2000 with partitioned plasma generation regions within the processing chamber. During film etching, e.g., silicon, polysilicon, silicon oxide, silicon nitride, silicon oxynitride, silicon oxycarbide, carbon-containing material, etc., a process gas may be flowed into the first plasma region 2015 through a gas inlet assembly 2005. A remote plasma system (RPS) unit 2001 may be included in the system, and may process a gas which then may travel through gas inlet assembly 2005. The inlet assembly 2005 may include two or more distinct gas supply channels where the second channel (not shown) may bypass the RPS unit 2001. Accordingly, in disclosed embodiments the precursor gases may be delivered to the processing chamber in an unexcited state. In another example, the first channel provided through the RPS may be used for the process gas and the second channel bypassing the RPS may be used for a treatment gas in disclosed embodiments. The process gases may be excited within the RPS unit 2001 prior to entering the first plasma region 2015. Accordingly, a fluorine-containing precursor, for example, may pass through RPS 2001 or bypass the RPS unit in disclosed embodiments. Various other examples encompassed by this arrangement will be similarly understood.

A cooling plate 2003, faceplate 2017, ion suppressor 2023, showerhead 2025, and a pedestal 2065, having a substrate 2055 disposed thereon, are shown and may each be included according to disclosed embodiments. The pedestal 2065 may have a heat exchange channel through which a heat exchange fluid flows to control the temperature of the substrate. This configuration may allow the substrate 2055 temperature to be cooled or heated to maintain relatively low temperatures, such as between about −20° C. to about 200° C., or therebetween. The heat exchange fluid may comprise ethylene glycol and/or water. The wafer support platter of the pedestal 2065, which may comprise aluminum, ceramic, or a combination thereof, may also be resistively heated in order to achieve relatively high temperatures, such as from up to or about 100° C. to above or about 1100° C., using an embedded resistive heater element. The heating element may be formed within the pedestal as one or more loops, and an outer portion of the heater element may run adjacent to a perimeter of the support platter, while an inner portion runs on the path of a concentric circle having a smaller radius. The wiring to the heater element may pass through the stem of the pedestal 2065, which may be further configured to rotate.

The faceplate 2017 may be pyramidal, conical, or of another similar structure with a narrow top portion expanding to a wide bottom portion. The faceplate 2017 may additionally be flat as shown and include a plurality of through-channels used to distribute process gases. Plasma generating gases and/or plasma excited species, depending on use of the RPS 2001, may pass through a plurality of holes in faceplate 2017 for a more uniform delivery into the first plasma region 2015.

Exemplary configurations may include having the gas inlet assembly 2005 open into a gas supply region 2058 partitioned from the first plasma region 2015 by faceplate 2017 so that the gases/species flow through the holes in the faceplate 2017 into the first plasma region 2015. Structural and operational features may be selected to prevent significant backflow of plasma from the first plasma region 2015 back into the supply region 2058, gas inlet assembly 2005, and fluid supply system (not shown). The structural features may include the selection of dimensions and cross-sectional geometries of the apertures in faceplate 2017 to deactivate back-streaming plasma. The operational features may include maintaining a pressure difference between the gas supply region 2058 and first plasma region 2015 that maintains a unidirectional flow of plasma through the showerhead 2025. The faceplate 2017, or a conductive top portion of the chamber, and showerhead 2025 are shown with an insulating ring 2020 located between the features, which allows an AC potential to be applied to the faceplate 2017 relative to showerhead 2025 and/or ion suppressor 2023. The insulating ring 2020 may be positioned between the faceplate 2017 and the showerhead 2025 and/or ion suppressor 2023 enabling a capacitively coupled plasma (CCP) to be formed in the first plasma region. A baffle (not shown) may additionally be located in the first plasma region 2015, or otherwise coupled with gas inlet assembly 2005, to affect the flow of fluid into the region through gas inlet assembly 2005.

The ion suppressor 2023 may comprise a plate or other geometry that defines a plurality of apertures throughout the structure that are configured to suppress the migration of charged species (e.g., ions) out of the plasma excitation region 2015 while allowing uncharged neutral or radical species to pass through the ion suppressor 2023 into an activated gas delivery region between the suppressor and the showerhead. In disclosed embodiments, the ion suppressor 2023 may comprise a perforated plate with a variety of aperture configurations. These uncharged species may include highly reactive species that are transported with less reactive carrier gas through the apertures. As noted above, the migration of ionic species through the holes may be reduced, and in some instances completely suppressed. Controlling the amount of ionic species passing through the ion suppressor 2023 may provide increased control over the gas mixture brought into contact with the underlying wafer substrate, which in turn may increase control of the deposition and/or etch characteristics of the gas mixture. For example, adjustments in the ion concentration of the gas mixture can significantly alter its etch selectivity. In alternative embodiments in which deposition is performed, it can also shift the balance of conformal-to-flowable style depositions for dielectric materials, carbon-containing materials, and other materials.

The plurality of holes in the ion suppressor 2023 may be configured to control the passage of the activated gas, i.e., the ionic, radical, and/or neutral species, through the ion suppressor 2023. For example, the aspect ratio of the holes, or the hole diameter to length, and/or the geometry of the holes may be controlled so that the flow of ionically-charged species in the activated gas passing through the ion suppressor 2023 is reduced. The holes in the ion suppressor 2023 may include a tapered portion that faces the plasma excitation region 2015, and a cylindrical portion that faces the showerhead 2025. The cylindrical portion may be shaped and dimensioned to control the flow of ionic species passing to the showerhead 2025. An adjustable electrical bias may also be applied to the ion suppressor 2023 as an additional means to control the flow of ionic species through the suppressor.

The ion suppression element 2023 may function to reduce or eliminate the amount of ionically-charged species traveling from the plasma generation region to the substrate. Uncharged neutral and radical species may still pass through the openings in the ion suppressor to react with the substrate. It should be noted that the complete elimination of ionically-charged species in the reaction region surrounding the substrate is not always the desired goal. In many instances, ionic species are required to reach the substrate in order to perform the etch and/or deposition process. In these instances, the ion suppressor may help to control the concentration of ionic species in the reaction region at a level that assists the process.

Showerhead 2025 in combination with ion suppressor 2023 may allow a plasma present in chamber plasma region 2015 to avoid directly exciting gases in substrate processing region 2033, while still allowing excited species to travel from chamber plasma region 2015 into substrate processing region 2033. In this way, the chamber may be configured to prevent the plasma from contacting a substrate 2055 being etched. This may advantageously protect a variety of intricate structures and films patterned on the substrate, which may be damaged, dislocated, or otherwise warped if directly contacted by a generated plasma. Additionally, when plasma is allowed to contact the underlying material exposed by trenches, such as the etch stop, the rate at which the underlying material etches may increase.

The processing system may further include a power supply 2040 electrically coupled with the processing chamber to provide electric power to the faceplate 2017, ion suppressor 2023, showerhead 2025, and/or pedestal 2065 to generate a plasma in the first plasma region 2015 or processing region 2033. The power supply may be configured to deliver an adjustable amount of power to the chamber depending on the process performed. Such a configuration may allow for a tunable plasma to be used in the processes being performed. Unlike a remote plasma unit, which is often presented with on or off functionality, a tunable plasma may be configured to deliver a specific amount of power to the plasma region 2015. This in turn may allow development of particular plasma characteristics such that precursors may be dissociated in specific ways to enhance the etching profiles produced by these precursors.

A plasma may be ignited either in chamber plasma region 2015 above showerhead 2025 or substrate processing region 2033 below showerhead 2025. A plasma may be present in chamber plasma region 2015 to produce radical-fluorine precursors from an inflow of a fluorine-containing precursor. An AC voltage typically in the radio frequency (RF) range may be applied between the conductive top portion of the processing chamber, such as faceplate 2017, and showerhead 2025 and/or ion suppressor 2023 to ignite a plasma in chamber plasma region 2015 during deposition. An RF power supply may generate a high RF frequency of 13.56 MHz but may also generate other frequencies alone or in combination with the 13.56 MHz frequency.

Plasma power can be of a variety of frequencies or a combination of multiple frequencies. In the exemplary processing system the plasma may be provided by RF power delivered to faceplate 2017 relative to ion suppressor 2023 and/or showerhead 2025. The RF power may be between about 10 watts and about 2000 watts, between about 100 watts and about 2000 watts, between about 200 watts and about 1500 watts, or between about 200 watts and about 1000 watts in different embodiments. The RF frequency applied in the exemplary processing system may be low RF frequencies less than about 200 kHz, high RF frequencies between about 10 MHz and about 15 MHz, or microwave frequencies greater than or about 1 GHz in different embodiments. The plasma power may be capacitively-coupled (CCP) or inductively-coupled (ICP) into the remote plasma region.

The top plasma region 2015 may be left at low or no power when a bottom plasma in the substrate processing region 2033 is turned on to, for example, cure a film or clean the interior surfaces bordering substrate processing region 2033. A plasma in substrate processing region 2033 may be ignited by applying an AC voltage between showerhead 2025 and the pedestal 2065 or bottom of the chamber. A cleaning gas may be introduced into substrate processing region 2033 while the plasma is present.

A fluid, such as a precursor, for example a fluorine-containing precursor, may be flowed into the processing region 2033 by embodiments of the showerhead described herein. Excited species derived from the process gas in the plasma region 2015 may travel through apertures in the ion suppressor 2023, and/or showerhead 2025 and react with an additional precursor flowing into the processing region 2033 from a separate portion of the showerhead. Alternatively, if all precursor species are being excited in plasma region 2015, no additional precursors may be flowed through the separate portion of the showerhead. Little or no plasma may be present in the processing region 2033. Excited derivatives of the precursors may combine in the region above the substrate and, on occasion, on the substrate to etch structures or remove species on the substrate in disclosed applications.

Exciting the fluids in the first plasma region 2015 directly, or exciting the fluids in the RPS unit 2001, may provide several benefits. The concentration of the excited species derived from the fluids may be increased within the processing region 2033 due to the plasma in the first plasma region 2015. This increase may result from the location of the plasma in the first plasma region 2015. The processing region 2033 may be located closer to the first plasma region 2015 than the remote plasma system (RPS) 2001, leaving less time for the excited species to leave excited states through collisions with other gas molecules, walls of the chamber, and surfaces of the showerhead.

The uniformity of the concentration of the excited species derived from the process gas may also be increased within the processing region 2033. This may result from the shape of the first plasma region 2015, which may be more similar to the shape of the processing region 2033. Excited species created in the RPS unit 2001 may travel greater distances in order to pass through apertures near the edges of the showerhead 2025 relative to species that pass through apertures near the center of the showerhead 2025. The greater distance may result in a reduced excitation of the excited species and, for example, may result in a slower growth rate near the edge of a substrate. Exciting the fluids in the first plasma region 2015 may mitigate this variation for the fluid flowed through RPS 2001.

The processing gases may be excited in the RPS unit 2001 and may be passed through the showerhead 2025 to the processing region 2033 in the excited state. Alternatively, power may be applied to the first processing region to either excite a plasma gas or enhance an already excited process gas from the RPS. While a plasma may be generated in the processing region 2033, a plasma may alternatively not be generated in the processing region. In one example, the only excitation of the processing gas or precursors may be from exciting the processing gases in the RPS unit 2001 to react with the substrate 2055 in the processing region 2033.

In addition to the fluid precursors, there may be other gases introduced at varied times for varied purposes, including carrier gases to aid delivery. A treatment gas may be introduced to remove unwanted species from the chamber walls, the substrate, the deposited film and/or the film during deposition. A treatment gas may be excited in a plasma and then used to reduce or remove residual content inside the chamber. In other disclosed embodiments the treatment gas may be used without a plasma. When the treatment gas includes water vapor, the delivery may be achieved using a mass flow meter (MFM), mass flow controller (MFC), an injection valve, or by commercially available water vapor generators. The treatment gas may be introduced to the processing region 2033, either through the RPS unit or bypassing the RPS units, and may further be excited in the first plasma region.

FIG. 6B shows a detailed view of the features affecting the processing gas distribution through faceplate 2017. As shown in FIGS. 6A and 6B, faceplate 2017, cooling plate 2003, and gas inlet assembly 2005 intersect to define a gas supply region 2058 into which process gases may be delivered from gas inlet 2005. The gases may fill the gas supply region 2058 and flow to first plasma region 2015 through apertures 2059 in faceplate 2017. The apertures 2059 may be configured to direct flow in a substantially unidirectional manner such that process gases may flow into processing region 2033, but may be partially or fully prevented from backflow into the gas supply region 2058 after traversing the faceplate 2017.

The gas distribution assemblies such as showerhead 2025 for use in the processing chamber section 2000 may be referred to as dual channel showerheads (DCSH) and are additionally detailed in the embodiments described in FIG. 6A as well as FIG. 7 herein. The dual channel showerhead may provide for etching processes that allow for separation of etchants outside of the processing region 2033 to provide limited interaction with chamber components and each other prior to being delivered into the processing region.

The showerhead 2025 may comprise an upper plate 2014 and a lower plate 2016. The plates may be coupled with one another to define a volume 2018 between the plates. The coupling of the plates may be so as to provide first fluid channels 2019 through the upper and lower plates, and second fluid channels 2021 through the lower plate 2016. The formed channels may be configured to provide fluid access from the volume 2018 through the lower plate 2016 via second fluid channels 2021 alone, and the first fluid channels 2019 may be fluidly isolated from the volume 2018 between the plates and the second fluid channels 2021. The volume 2018 may be fluidly accessible through a side of the gas distribution assembly 2025. Although the exemplary system of FIG. 6A includes a dual-channel showerhead, it is understood that alternative distribution assemblies may be utilized that maintain first and second precursors fluidly isolated prior to the processing region 2033. For example, a perforated plate and tubes underneath the plate may be utilized, although other configurations may operate with reduced efficiency or not provide as uniform processing as the dual-channel showerhead as described.

In the embodiment shown, showerhead 2025 may distribute via first fluid channels 2019 process gases which contain plasma effluents upon excitation by a plasma in chamber plasma region 2015 or from RPS unit 2001. In embodiments, the process gas introduced into the RPS unit 2001 and/or chamber plasma region 2015 may contain fluorine, e.g., CF₄, NF₃, or XeF₂, oxygen, e.g. N₂O, or hydrogen-containing precursors, e.g. H₂ or NH₃. One or both process gases may also include a carrier gas such as helium, argon, nitrogen (N₂), etc. Plasma effluents may include ionized or neutral derivatives of the process gas and may also be referred to herein as a radical-fluorine precursor, referring to the atomic constituent of the process gas introduced. In an example, a fluorine-containing gas, such as NF₃, may be excited in the RPS unit 2001 and passed through regions 2015 and 2033 without the additional generation of plasmas in those regions. Plasma effluents from the RPS unit 2001 may pass through the showerhead 2025 and then react with the substrate 2055. After passing through the showerhead 2025, plasma effluents may include radical species and may be essentially devoid of ionic species or UV light. These plasma effluents may react with films on the substrate 2055, e.g., titanium nitride and other masking material.

The gas distribution assemblies 2025 for use in the processing chamber section 2000 are referred to as dual channel showerheads (DCSH) and are detailed in the embodiments described in FIG. 7 herein. The dual channel showerhead may allow for flowable deposition of a material, and separation of precursor and processing fluids during operation. The showerhead may alternatively be utilized for etching processes that allow for separation of etchants outside of the reaction zone to provide limited interaction with chamber components and each other prior to being delivered into the processing region.

FIG. 7 is a bottom view of a showerhead 3025 for use with a processing chamber according to disclosed embodiments. Showerhead 3025 may correspond with the showerhead shown in FIG. 6A. Through-holes 3065, which show a view of first fluid channels 2019, may have a plurality of shapes and configurations in order to control and affect the flow of precursors through the showerhead 3025. Small holes 3075, which show a view of second fluid channels 2021, may be distributed substantially evenly over the surface of the showerhead, even among the through-holes 3065, which may help to provide more even mixing of the precursors as they exit the showerhead than other configurations.

FIG. 8 shows a schematic cross-sectional view of an exemplary processing system 4000 according to embodiments of the present technology. System 4000 may be a variation of system 100 in FIG. 1. System 4000 may also include variations on the chamber illustrated in FIG. 6A, and may include some or all of the components illustrated in that figure. System 4000 may include a processing chamber 4005 and a remote plasma unit 4010. The remote plasma unit 4010 may be coupled with processing chamber 4005 with one or more components. The remote plasma unit 4010 may be coupled with one or more of a remote plasma unit adapter 4015, an isolator 4020, a pressure plate 4025, and inlet adapter 4030, a diffuser 4035, or a mixing manifold 4040. Mixing manifold 4040 may be coupled with a top of processing chamber 4005, and may be coupled with an inlet to processing chamber 4005.

Remote plasma unit adapter 4015 may be coupled with remote plasma unit 4010 at a first end 4011, and may be coupled with isolator 4020 at a second end 4012 opposite first end 4011. Through remote plasma unit adapter 4015 may define one or more channels. At first end 4011 may be defined an opening or port to a channel 4013. Channel 4013 may be centrally defined within remote plasma unit adapter 4015, and may be characterized by a first cross-sectional surface area in a direction normal to a central axis through remote plasma unit adapter 4015, which may be in the direction of flow from the remote plasma unit 4010. A diameter of channel 4013 may be equal to or in common with an exit port from remote plasma unit 4010. Channel 4013 may be characterized by a length from the first end 4011 to the second end 4012. Channel 4013 may extend through the entire length of remote plasma unit adapter 4015, or a length less than the length from first end 4011 to second end 4012. For example, channel 4013 may extend less than halfway of the length from the first end 4011 to the second end 4012, channel 4013 may extend halfway of the length from the first end 4011 to the second end 4012, channel 4013 may extend more than halfway of the length from the first end 4011 to the second end 4012, or channel 4013 may extend about halfway of the length from the first end 4011 to the second end 4012 of remote plasma unit adapter 4015.

Remote plasma unit adapter 4015 may also define one or more trenches 4014 defined beneath remote plasma unit adapter 4015. Trenches 4014 may be or include one or more annular recesses defined within remote plasma unit adapter 4015 to allow seating of an o-ring or elastomeric element, which may allow coupling with an isolator 4020.

Isolator 4020 may be coupled with second end 4012 of remote plasma unit adapter 4015 in embodiments. Isolator 4020 may be or include an annular member about an isolator channel 4021. Isolator channel 4021 may be axially aligned with a central axis in the direction of flow through remote plasma unit adapter 4015. Isolator channel 4021 may be characterized by a second cross-sectional area in a direction normal to a direction of flow through isolator 4020. The second cross-sectional area may be equal to, greater than, or less than the first cross-sectional area of channel 4013. In embodiments, isolator channel 4021 may be characterized by a diameter greater than, equal to, or about the same as a diameter of channel 4013 through remote plasma unit adapter 4015.

Isolator 4020 may be made of a similar or different material from remote plasma unit adapter 4015, mixing manifold 4040, or any other chamber component. In some embodiments, while remote plasma unit adapter 4015 and mixing manifold 4040 may be made of or include aluminum, including oxides of aluminum, treated aluminum on one or more surfaces, or some other material, isolator 4020 may be or include a material that is less thermally conductive than other chamber components. In some embodiments, isolator 4020 may be or include a ceramic, plastic, or other thermally insulating component configured to provide a thermal break between the remote plasma unit 4010 and the chamber 4005. During operation, remote plasma unit 4010 may be cooled or operate at a lower temperature relative to chamber 4005, while chamber 4005 may be heated or operate at a higher temperature relative to remote plasma unit 4010. Providing a ceramic or thermally insulating isolator 4020 may prevent or limit thermal, electrical, or other interference between the components.

Coupled with isolator 4020 may be a pressure plate 4025. Pressure plate 4025 may be or include aluminum or another material in embodiments, and pressure plate 4025 may be made of or include a similar or different material than remote plasma unit adapter 4015 or mixing manifold 4040 in embodiments. Pressure plate 4025 may define a central aperture 4023 through pressure plate 4025. Central aperture 4023 may be characterized by a tapered shape through pressure plate 4025 from a portion proximate isolator channel 4021 to the opposite side of pressure plate 4025. A portion of central aperture 4023 proximate isolator channel 4021 may be characterized by a cross-sectional area normal a direction of flow equal to or similar to a cross-sectional area of isolator channel 4021. Central aperture 4023 may be characterized by a percentage of taper of greater than or about 10% across a length of pressure plate 4025, and may be characterized by a percentage of taper greater than or about 20%, greater than or about 30%, greater than or about 40%, greater than or about 50%, greater than or about 60%, greater than or about 70%, greater than or about 80%, greater than or about 90%, greater than or about 100%, greater than or about 150%, greater than or about 200%, greater than or about 300%, or greater in embodiments. Pressure plate 4025 may also define one or more trenches 4024 defined beneath isolator 4020. Trenches 4024 may be or include one or more annular recesses defined within pressure plate 4025 to allow seating of an o-ring or elastomeric element, which may allow coupling with isolator 4020.

An inlet adapter 4030 may be coupled with pressure plate 4025 at a first end 4026, and coupled with diffuser 4035 at a second end 4027 opposite first end 4026. Inlet adapter 4030 may define a central channel 4028 defined through inlet adapter 4030. Central channel 4028 may be characterized by a first portion 4029 a, and a second portion 4029 b. First portion 4029 a may extend from first end 4026 to a first length through inlet adapter 4030, wherein central channel 4028 may transition to second portion 4029 b, which may extend to second end 4027. First portion 4029 a may be characterized by a first cross-sectional area or diameter, and second portion 4029 b may be characterized by a second cross-sectional area or diameter less than the first. In embodiments the cross-sectional area or diameter of first portion 4029 a may be twice as large as the cross-sectional area or diameter of second portion 4029 b, and may be up to or greater than about three times as large, greater than or about 4 times as large, greater than or about 5 times as large, greater than or about 6 times as large, greater than or about 7 times as large, greater than or about 8 times as large, greater than or about 9 times as large, greater than or about 10 times as large, or greater in embodiments. Central channel 4028 may be configured to provide plasma effluents of a precursor delivered from remote plasma unit 4010 in embodiments, which may pass through channel 4013 of remote plasma unit adapter 4015, isolator channel 4021 of isolator 4020, and central aperture 4023 of pressure plate 4025.

Inlet adapter 4030 may also define one or more second channels 4031, which may extend from below first portion 4029 a to or through second end 4027. The second channels 4031 may be characterized by a second cross-sectional surface area in a direction normal to the central axis through inlet adapter 4030. The second cross-sectional surface area may be less than the cross-sectional surface area of first portion 4029 a in embodiments, and may be greater than the cross-sectional surface area or a diameter of second portion 4029 b. Second channels 4031 may extend to an exit from inlet adapter 4030 at second end 4027, and may provide egress from adapter 4030 for a precursor, such as a first bypass precursor, delivered alternately from the remote plasma unit 4010. For example, second channel 4031 may be fluidly accessible from a first port 4032 defined along an exterior surface, such as a side, of inlet adapter 4030, which may bypass remote plasma unit 4010. First port 4032 may be at or below first portion 4029 a along a length of inlet adapter 4030, and may be configured to provide fluid access to the second channel 4031.

Second channel 4031 may deliver the precursor through the inlet adapter 4030 and out second end 4027. Second channel 4031 may be defined in a region of inlet adapter 4030 between first portion 4029 a and second end 4027. In embodiments, second channel 4031 may not be accessible from central channel 4028. Second channel 4031 may be configured to maintain a precursor fluidly isolated from plasma effluents delivered into central channel 4028 from remote plasma unit 4010. The first bypass precursor may not contact plasma effluents until exiting inlet adapter 4030 through second end 4027. Second channel 4031 may include one or more channels defined in adapter 4030. Second channel 4031 may be centrally located within adapter 4030, and may be associated with central channels 4028. For example, second channel 4031 may be concentrically aligned and defined about central channel 4028 in embodiments. Second channel 4031 may be an annular or cylindrical channel extending partially through a length or vertical cross-section of inlet adapter 4030 in embodiments. In some embodiments, second channel 4031 may also be a plurality of channels extending radially about central channel 4028.

Inlet adapter 4030 may also define one or more third channels 4033, which may extend from below first portion 4029 a to or through second end 4027, and may extend from below a plane bisecting first port 4032. The third channels 4033 may be characterized by a third cross-sectional surface area in a direction normal to the central axis through inlet adapter 4030. The third cross-sectional surface area may be less than the cross-sectional surface area of first portion 4029 a in embodiments, and may be greater than the cross-sectional surface area or a diameter of second portion 4029 b. The third cross-sectional surface area may also be equal to or similar to the cross-sectional surface area or a diameter of first portion 4029 a as illustrated. For example, an outer diameter of third channel 4033 may be equivalent to an outer diameter of first portion 4029 a, or may be less than an outer diameter of first portion 4029 a. Third channels 4033 may extend to an exit from inlet adapter 4030 at second end 4027, and may provide egress from adapter 4030 for a precursor, such as a second bypass precursor, delivered alternately from the remote plasma unit 4010. For example, third channel 4033 may be fluidly accessible from a second port 4034 defined along an exterior surface, such as a side, of inlet adapter 4030, which may bypass remote plasma unit 4010. Second port 4034 may be located on an opposite side or portion of inlet adapter 4030 as first port 4032. Second port 4034 may be at or below first portion 4029 a along a length of inlet adapter 4030, and may be configured to provide fluid access to the third channel 4033. Second port 4034 may also be at or below first port 4032 along a length of inlet adapter 4030 in embodiments.

Third channel 4033 may deliver the second bypass precursor through the inlet adapter 4030 and out second end 4027. Third channel 4033 may be defined in a region of inlet adapter 4030 between first portion 4029 a and second end 4027. In embodiments, third channel 4033 may not be accessible from central channel 4028. Third channel 4033 may be configured to maintain a second bypass precursor fluidly isolated from plasma effluents delivered into central channel 4028 from remote plasma unit 4010, and from a first bypass precursor delivered into second channel 4031 through first port 4032. The second bypass precursor may not contact plasma effluents or a first bypass precursor until exiting inlet adapter 4030 through second end 4027. Third channel 4033 may include one or more channels defined in adapter 4030. Third channel 4033 may be centrally located within adapter 4030, and may be associated with central channels 4028 and second channel 4031. For example, third channel 4033 may be concentrically aligned and defined about central channel 4028 in embodiments, and may be concentrically aligned and defined about second channel 4031. Third channel 4033 may be a second annular or cylindrical channel extending partially through a length or vertical cross-section of inlet adapter 4030 in embodiments. In some embodiments, third channel 4033 may also be a plurality of channels extending radially about central channel 4028.

Diffuser 4035 may be positioned between inlet adapter 4030 and mixing manifold 4040 to maintain precursors delivered through inlet adapter 4030 fluidly isolated until accessing mixing manifold 4040. Diffuser 4035 may be characterized by one or more channels, such as cylindrical or annular channels defined through diffuser 4035. In embodiments, diffuser 4035 may define a first channel 4036 or central channel, a second channel 4037, and a third channel 4038. The channels may be characterized by similar dimensions or diameters as second portion 4029 b of central channel 4028, second channel 4031, and third channel 4033 of inlet adapter 4030. For example, each channel may extend the inlet adapter channels to mixing manifold 4040. Second channel 4037 and third channel 4038 may each be annular channels defined about first channel 4036, and first channel 4036, second channel 4037, and third channel 4038 may be concentrically aligned in embodiments and defined through diffuser 4035.

Diffuser 4035 may additionally define one or more trenches 4039 about diffuser 4035. For example, diffuser 4035 may define a first trench 4039 a, a second trench 4039 b, and a third trench 4039 c in embodiments, which may allow seating of o-rings or elastomeric members between inlet adapter 4030 and diffuser 4035. Each of trenches 4039 may be an annular trench in embodiments that sits radially exterior to one or more of the channels defined through diffuser 4035. First trench 4039 a may be located radially outward of first channel 4036, and may be located between first channel 4036 and second channel 4037. Second trench 4039 b may be located radially outward of second channel 4037, and may be located between second channel 4037 and third channel 4038. Third trench 4039 c may be located radially outward of third channel 4038. A diameter of each trench 4039 may be greater than the channel to which it may be associated and to which it may be located radially exterior. The trenches may enable improved sealing between the inlet adapter 4030 and the diffuser 4035 to ensure precursors are maintained fluidly isolated between the components, and leaking between the channels does not occur.

Mixing manifold 4040 may be coupled with diffuser 4035 at a first end 4041, and may be coupled with chamber 4005 at a second end 4042. Mixing manifold 4040 may define an inlet 4043 at first end 4041. Inlet 4043 may provide fluid access from diffuser 4035, and inlet 4043 may be characterized by a diameter equal to or about the same as a diameter of third channel 4038 through diffuser 4035. Inlet 4043 may define a portion of a channel 4044 through mixing manifold 4040, and the channel 4044 may be composed of one or more sections defining a profile of channel 4044. Inlet 4043 may be a first section in the direction of flow through channel 4044 of mixing manifold 4040. Inlet 4043 may be characterized by a length that may be less than half a length in the direction of flow of mixing manifold 4040. The length of inlet 4043 may also be less than a third of the length of mixing manifold 4040, and may be less than one quarter the length of mixing manifold 4040 in embodiments. Inlet 4043 may receive each precursor from diffuser 4035, and may allow for mixing of the precursors, which may have been maintained fluidly isolated until delivery to mixing manifold 4040.

Inlet 4043 may extend to a second section of channel 4044, which may be or include a tapered section 4045. Tapered section 4045 may extend from a first diameter equal to or similar to a diameter of inlet 4043 to a second diameter less than the first diameter. In some embodiments, the second diameter may be about or less than half the first diameter. Tapered section 4045 may be characterized by a percentage of taper of greater than or about 10%, greater than or about 20%, greater than or about 30%, greater than or about 40%, greater than or about 50%, greater than or about 60%, greater than or about 70%, greater than or about 80%, greater than or about 90%, greater than or about 100%, greater than or about 150%, greater than or about 200%, greater than or about 300%, or greater in embodiments.

Tapered section 4045 may transition to a third region of channel 4044, which may be a flared section 4046. Flared section 4046 may extend from tapered section 4045 to an outlet of mixing manifold 4040 at second end 4042. Flared section 4046 may extend from a first diameter equal to the second diameter of tapered section 4045 to a second diameter greater than the first diameter. In some embodiments, the second diameter may be about or greater than double the first diameter. Flared section 4046 may be characterized by a percentage of flare of greater than or about 10%, greater than or about 20%, greater than or about 30%, greater than or about 40%, greater than or about 50%, greater than or about 60%, greater than or about 70%, greater than or about 80%, greater than or about 90%, greater than or about 100%, greater than or about 150%, greater than or about 200%, greater than or about 300%, or greater in embodiments.

Flared section 4046 may provide egress to precursors delivered through mixing manifold 4040 through second end 4042 via an outlet 4047. The sections of channel 4044 through mixing manifold 4040 may be configured to provide adequate or thorough mixing of precursors delivered to the mixing manifold, before providing the mixed precursors into chamber 44005. Unlike conventional technology, by performing the etchant or precursor mixing prior to delivery to a chamber, the present systems may provide an etchant having uniform properties prior to being distributed about a chamber and substrate. In this way, processes performed with the present technology may have more uniform results across a substrate surface.

Processing chamber 4005 may include a number of components in a stacked arrangement. The chamber stack may include a gasbox 4050, a blocker plate 4060, a faceplate 4070, an ion suppression element 4080, and a lid spacer 4090. The components may be utilized to distribute a precursor or set of precursors through the chamber to provide a uniform delivery of etchants or other precursors to a substrate for processing. In embodiments, these components may be stacked plates each at least partially defining an exterior of chamber 4005.

Gasbox 4050 may define a chamber inlet 4052. A central channel 4054 may be defined through gasbox 4050 to deliver precursors into chamber 4005. Inlet 4052 may be aligned with outlet 4047 of mixing manifold 4040. Inlet 4052 and/or central channel 4054 may be characterized by a similar diameter in embodiments. Central channel 4054 may extend through gasbox 4050 and be configured to deliver one or more precursors into a volume 4057 defined from above by gasbox 4050. Gasbox 4050 may include a first surface 4053, such as a top surface, and a second surface 4055 opposite the first surface 4053, such as a bottom surface of gasbox 4050. Top surface 4053 may be a planar or substantially planar surface in embodiments. Coupled with top surface 4053 may be a heater 4048.

Heater 4048 may be configured to heat chamber 4005 in embodiments, and may conductively heat each lid stack component. Heater 4048 may be any kind of heater including a fluid heater, electrical heater, microwave heater, or other device configured to deliver heat conductively to chamber 4005. In some embodiments, heater 4048 may be or include an electrical heater formed in an annular pattern about first surface 4053 of gasbox 4050. The heater may be defined across the gasbox 4050, and around mixing manifold 4040. The heater may be a plate heater or resistive element heater that may be configured to provide up to, about, or greater than about 2,000 W of heat, and may be configured to provide greater than or about 2,500 W, greater than or about 3,000 W, greater than or about 3,500 W, greater than or about 4,000 W, greater than or about 4,500 W, greater than or about 5,000 W, or more.

Heater 4048 may be configured to produce a variable chamber component temperature up to, about, or greater than about 50° C., and may be configured to produce a chamber component temperature greater than or about 75° C., greater than or about 100° C., greater than or about 150° C., greater than or about 200° C., greater than or about 250° C., greater than or about 300° C., or higher in embodiments. Heater 4048 may be configured to raise individual components, such as the ion suppression element 4080, to any of these temperatures to facilitate processing operations, such as an anneal. In some processing operations, a substrate may be raised toward the ion suppression element 4080 for an annealing operation, and heater 4048 may be adjusted to conductively raise the temperature of the heater to any particular temperature noted above, or within any range of temperatures within or between any of the stated temperatures.

Second surface 4055 of gasbox 4050 may be coupled with blocker plate 4060. Blocker plate 4060 may be characterized by a diameter equal to or similar to a diameter of gasbox 4050. Blocker plate 4060 may define a plurality of apertures 4063 through blocker plate 4060, only a sample of which are illustrated, which may allow distribution of precursors, such as etchants, from volume 4057, and may begin distributing precursors through chamber 4005 for a uniform delivery to a substrate. Although only a few apertures 4063 are illustrated, it is to be understood that blocker plate 4060 may have any number of apertures 4063 defined through the structure. Blocker plate 4060 may be characterized by a raised annular section 4065 at an external diameter of the blocker plate 4060, and a lowered annular section 4066 at an external diameter of the blocker plate 4060. Raised annular section 4065 may provide structural rigidity for the blocker plate 4060, and may define sides or an external diameter of volume 4057 in embodiments. Blocker plate 4060 may also define a bottom of volume 4057 from below. Volume 4057 may allow distribution of precursors from central channel 4054 of gasbox 4050 before passing through apertures 4063 of blocker plate 4060. Lowered annular section 4066 may also provide structural rigidity for the blocker plate 4060, and may define sides or an external diameter of a second volume 4058 in embodiments. Blocker plate 4060 may also define a top of volume 4058 from above, while a bottom of volume 4058 may be defined by faceplate 4070 from below.

Faceplate 4070 may include a first surface 4072 and a second surface 4074 opposite the first surface 4072. Faceplate 4070 may be coupled with blocker plate 4060 at first surface 4072, which may engage lowered annular section 4066 of blocker plate 4060. Faceplate 4070 may define a ledge 4073 at an interior of second surface 4074, extending to third volume 4075 at least partially defined within or by faceplate 4070. For example, faceplate 4070 may define sides or an external diameter of third volume 4075 as well as a top of volume 4075 from above, while ion suppression element 4080 may define third volume 4075 from below. Faceplate 4070 may define a plurality of channels through the faceplate, such as previously described with chamber 2000, although not illustrated in FIG. 8.

Ion suppression element 4080 may be positioned proximate the second surface 4074 of faceplate 4070, and may be coupled with faceplate 4070 at second surface 4074. Ion suppression element 4080 may be similar to ion suppressor 2023 described above, and may be configured to reduce ionic migration into a processing region of chamber 4005 housing a substrate. Ion suppression element 4080 may define a plurality of apertures through the structure as illustrated in FIG. 6A, although not illustrated in FIG. 8. In embodiments, gasbox 4050, blocker plate 4060, faceplate 4070, and ion suppression element 4080 may be coupled together, and in embodiments may be directly coupled together. By directly coupling the components, heat generated by heater 4048 may be conducted through the components to maintain a particular chamber temperature that may be maintained with less variation between components. Ion suppression element 4080 may also contact lid spacer 4090, which together may at least partially define a plasma processing region in which a substrate is maintained during processing.

Turning to FIG. 9 is illustrated a bottom partial plan view of an inlet adapter 5000 according to embodiments of the present technology. Inlet adapter 5000 may be similar to inlet adapter 4030 in embodiments. As illustrated, inlet adapter may include three channels concentrically aligned about a central axis of inlet adapter 5000. It is to be understood that in other embodiments the inlet adapter 5000 may include more or fewer channels than illustrated. Inlet adapter 5000 may include a central channel 5005 that may be fluidly accessible from a remote plasma unit as previously discussed. Central channel 5005 may extend fully through inlet adapter 5000. Second channel 5010 may extend about central channel 5005 and may provide fluid access for a first bypass precursor delivered additionally or alternatively with plasma effluents of a precursor through central channel 5005. Second channel 5010 may be accessed from first port 5012 defined along an exterior of inlet adapter 5000. Second channel 5010 may be concentrically aligned with central channel 5005, and may maintain a first bypass precursor fluidly isolated from plasma effluents or a different precursor flowing through central channel 5005.

Third channel 5015 may extend about central channel 5005 and second channel 5010, and may provide fluid access for a second bypass precursor delivered additionally or alternatively with plasma effluents of a precursor through central channel 5005 and a first bypass precursor through second channel 5010. Third channel 5015 may be accessed from a second port 5017 defined along an exterior of inlet adapter 5000, which may be located on a side of inlet adapter 5000 opposite first port 5012. Second port 5017 as well as third channel 5015 may be located below a horizontal plane through first port 5012. Third channel 5015 may be concentrically aligned with central channel 5005, and may maintain a second bypass precursor fluidly isolated from plasma effluents or a different precursor flowing through central channel 5005, and a first bypass precursor delivered through second channel 5010.

Both second channel 5010 and third channel 5015 may be annular channel defined at least partially through a length of inlet adapter 5000 in embodiments. The channels may also be a plurality of channels defined radially about central channel 5005. By providing three separate pathways for precursors, different volumes and/or flow rates of precursors may be utilized providing greater control over precursor delivery and etchant generation. Each precursor may be delivered with one or more carrier gases, and etchant developed may be finely tuned prior to delivery into a processing chamber fluidly coupled with inlet adapter 5000.

The above description of example embodiments of the invention has been presented for the purposes of illustration and description. It is not intended to be exhaustive or to limit the invention to the precise form described, and many modifications and variations are possible in light of the teaching above.

In the preceding description, for the purposes of explanation, numerous details have been set forth in order to provide an understanding of various embodiments of the present technology. It will be apparent to one skilled in the art, however, that certain embodiments may be practiced without some of these details, or with additional details.

Having described several embodiments, it will be recognized by those of skill in the art that various modifications, alternative constructions, and equivalents may be used without departing from the spirit of the invention. Additionally, a number of well-known processes and elements have not been described in order to avoid unnecessarily obscuring the present invention. Additionally, details of any specific embodiment may not always be present in variations of that embodiment or may be added to other embodiments.

Where a range of values is provided, it is understood that each intervening value, to the tenth of the unit of the lower limit unless the context clearly dictates otherwise, between the upper and lower limits of that range is also specifically disclosed. Each smaller range between any stated value or intervening value in a stated range and any other stated or intervening value in that stated range is encompassed. The upper and lower limits of these smaller ranges may independently be included or excluded in the range, and each range where either, neither, or both limits are included in the smaller ranges is also encompassed within the invention, subject to any specifically excluded limit in the stated range. Where the stated range includes one or both of the limits, ranges excluding either or both of those included limits are also included.

As used herein and in the appended claims, the singular forms “a”, “an”, and “the” include plural referents unless the context clearly dictates otherwise. Thus, for example, reference to “a method” includes a plurality of such methods and reference to “the layer” includes reference to one or more layers and equivalents thereof known to those skilled in the art, and so forth. The invention has now been described in detail for the purposes of clarity and understanding. However, it will be appreciated that certain changes and modifications may be practice within the scope of the appended claims.

All publications, patents, and patent applications cited herein are hereby incorporated by reference in their entirety for all purposes. None is admitted to be prior art. 

What is claimed is:
 1. A method of etching, the method comprising: mixing plasma effluents with a gas in a first section of a chamber to form a first mixture, wherein the first section comprises nickel plated material; flowing the first mixture to a substrate in a second section of the chamber, wherein: the second section comprises nickel plated material, the first mixture flows in a path in the chamber from the first section to the second section, and the path is defined by nickel plated parts of the chamber; reacting the first mixture with the substrate to etch a first layer selectively over a second layer; forming a second mixture comprising products from reacting the first mixture with the substrate.
 2. The method of claim 1, wherein the second section of the chamber is at a pressure of 10 Torr or lower.
 3. The method of claim 1, wherein the plasma effluents comprise effluents from flowing ammonia, NF₃, argon, H₂, helium, and HF through a plasma.
 4. The method of claim 1, further comprising: flowing the plasma effluents through a third section of the chamber that does not comprise nickel plated material.
 5. The method of claim 1, further comprising: flowing a hydrogen-containing gas and a fluorine-containing gas through a plasma to form the plasma effluents, and adsorbing fluorine atoms or hydrogen atoms onto the nickel plated material.
 6. The method of claim 1, wherein the nickel plated material comprises electroless nickel plated material.
 7. The method of claim 1, wherein the nickel plated material comprises nickel with boron or nickel with phosphorous.
 8. The method of claim 1, wherein the plasma effluents comprise effluents from flowing ammonia and a fluorine-containing gas through a plasma.
 9. The method of claim 8, wherein the fluorine-containing gas comprises NF₃ or HF.
 10. The method of claim 1, further comprising: flowing the second mixture through a third section of the chamber to exit the chamber, wherein the third section of the chamber comprises nickel plated material.
 11. The method of claim 10, wherein the third section is at least partially defined by a pump port.
 12. The method of claim 1, further comprising: flowing plasma effluents through a third section of the chamber that does not include nickel plated material before mixing the plasma effluents with the gas.
 13. The method of claim 12, wherein the third section comprises a ceramic material.
 14. The method of claim 1, wherein: the first layer is a thermal silicon oxide layer, the second layer is a silicon layer, and reacting the first mixture with the substrate comprises etching less than 1 Angstrom of the first layer and greater than 50 Angstroms of the second layer.
 15. The method of claim 14, wherein: the products comprise etch byproducts from etching silicon oxide.
 16. The method of claim 14, wherein the selectivity of etching the first layer over the second layer is greater than
 100. 17. A method of etching, the method comprising: flowing a first gas comprising ammonia and a fluorine-containing gas through a plasma to form plasma effluents; flowing the plasma effluents through a first section of a chamber; mixing a second gas comprising ammonia with the plasma effluents in a second section of the chamber to form a first mixture; flowing the first mixture to a substrate in a third section of the chamber; reacting the first mixture with the substrate to etch a silicon oxide layer selectively over a silicon layer; forming a second mixture comprising products from reacting the first mixture with the substrate; and flowing the second mixture through a fourth section of the chamber to exit the chamber, wherein: the first section of the chamber does not comprise nickel plated material, the second section, the third section, and the fourth section of the chamber comprise nickel plated material, the third section of the chamber is at a pressure of 10 Torr or lower, and reacting the first mixture with the substrate comprises etching less than 1 Angstrom of the silicon layer and greater than 50 Angstroms of the silicon oxide layer.
 18. The method of claim 17, wherein: the first mixture flows in a path in the chamber from the second section to the fourth section, and the path is defined by nickel plated parts of the chamber.
 19. The method of claim 17, wherein the nickel plated material comprises electroless nickel plated material.
 20. A method of etching, the method comprising: mixing plasma effluents with a gas in a first section of a chamber to form a first mixture, wherein: the first section comprises nickel plated material, and the plasma effluents comprise effluents from flowing ammonia, NF₃, argon, H₂, helium, and HF through a plasma; flowing the first mixture to a substrate in a second section of the chamber, wherein the second section comprises nickel plated material; reacting the first mixture with the substrate to etch a first layer selectively over a second layer; forming a second mixture comprising products from reacting the first mixture with the substrate. 